1, ask backing pump main cause pre vacuum pump work conditions.
2, in the main pump allow maximum exhaust pressure (
If the main pump for the diffusion pump, refers to the diffusion pump level before the biggest pressure & ndash;
—
Back pressure)
, before the pump must be able to one of the biggest gas generated by the main pump child discharged in time.
when choosing backing pump, takes an exam the note mechanical pump pumping speed is measured under atmospheric pressure, but the normal use of the pump are lower than atmospheric pressure under the conditions of operation, make the pump pumping speed dropped, so we must choose pump according to the pumping speed curve.
Without pumping speed curve, the empirical formula for reference.
for oil pump and the backing pump of oil diffusion pump, in addition to the backing pump equipped according to the above principles, also can recommend backing pump model according to the national standards.
3, double as backing pump drainage pumps to meet the requirement of drainage and drainage in vacuum.
- the above content is the manufacturer
Jia wei, please contact for more details
